Oxford Vacuum Science  
Bench-top high vacuum and thin film    
 
Bench-top high vacuum &
thin film deposition

Oxford Vacuum Science offers a range of high vacuum products for research & development and light industrial applications.

Oxford Vacuum Science's product range includes:

NanoSphere
NanoSphere is a highly flexible bench-top high vacuum platform for research & development and light industrial applications. Features and typical performance encompass:
  • All stainless steel "bell-jar" type vacuum chamber
    > low 10-7mbar range ultimate pressure

    •
  • 16m3/hr roughing pump for rapid evacuation
    >atmosphere to 1x10-5mbar in 5 minutes

    •
  • 240l/s wide-range turbo-pump for high vacuum
    > low 10-6mbar range in less than 1 hour
NanoSphere offers a safe power-off / shut-down mode for storing the chamber in clean, dry conditions, at a pressure of a few mbar and therefore protecting the turbo-pump bearing lubricant, whilst venting the backing pump to prevent rotary pump oil migration.

VapourPhase Ω
VapourPhase Ω is a new advanced mounting system for thermal evaporation, providing a real, low-cost alternative to electron beam technology, and featuring:
  • a high current, in-vacuo switch, for multi-layer deposition of up to four materials
  • Power Rail source clamp mounting system
  • individual source baffling
  • water cooling for thermal stability
  • rapid release source clamps
  • on-board 800A high current power supply
  • current / voltage control and RS232 interface
Oxford Vacuum Science develops innovative vacuum coating technologies to provide you with market leading performance in a compact, low cost format. For more information click on one of the product links opposite or e-mail technology@oxford-vacuum.com.

To find out more about the products and services Oxford Vacuum Science provides click on one of the links, or to contact a high vacuum consultant or engineer click on the contact link or e-mail us at design@oxford-vacuum.com.

Oxford Vacuum Science Ltd
39 South Street
Middle Barton
Oxfordshire
OX7 7BU UK

tel: +44 (0) 1869 349161
fax: +44 (0) 1869 349157
 OVS@oxford-vacuum.com
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