Deposition monitors and system accessories

A range of system accessories such as deposition monitors, viewport deposition baffles and fast entry doors, bakeout heaters etc. available to complement the Oxford Vacuum Science bench-top thin film deposition suite include:

XC-40 series

'substrate level' and 'rate-ramp' deposition monitors:

horizontal, collar level mounting on a choice of KF40 (XC-40), NW 40CF-F (XCU-40) or NW 40CF-F rotatable (XCR-40) flanges

mounting flange includes water-cooling and 2 x RF (BNC to SMB) feedthroughs

quartz crystal monitor head mounted on Cu cooling pipes secured on feedthrough flange

adjustable head angle and height

mounting pipe lengths configured for NanoSphere 4 (XC-40), PicoSphere (XCU-40) or VapourPhase rate-ramp monitor heads (XCR-40)

- contact OVS for other mounting pipe configurations

Inficon Q-Pod USB transducer interfaces directly with NanoSphere / PicoSphere PC and software

evaporation view

darkened viewport cover for NanoSphere and PicoSphere systems:

allows hot deposition sources to be viewed without risk of dmage to eyes
compatible with viewport deposition baffle
included as standard on all NanoSphere and PicoSphere systems
viewport and cover NW 100CF-F compatible

viewport deposition baffles

deposition baffle inserts to prevent opaque film deposition on viewport glass:

easy to install / remove for cleaning - sits on NW 100CF-F copper seal ring under viewport glass
angled glass slides block evaporated material from depositing on viewport glass and act as 'periscope' mirror if evaporant is reflective (most metals, SiO etc.)
uses standard 76mm x 25mm (3" x 1") microscope slides
easy to replace slides from inside system by removal of retaining plate

fast access viewport doors

hinged viewport doors allowing fast access to system without breaking main seal:

easy to install - directly replaces viewport glass and clamp using the same screws
NW 100CF-F compatible (via viewport adaptor) with full 102mm (4") bore to allow most hands to pass through
rapid access and re-sealing with 4 'thumb-screws'
can be used to access XC-40 deposition monitor head for rapid changing of quartz crystal

HH12x40 / HH12x60

480W / 720W internal halogen bakeout heaters

direct excitation of water molecules adsorbed on internal chamber surfaces
uses readily available mains voltage halogen bulbs
powered from PicoSphere plinth and controlled by platform software
back reflector distributes light within chamber
water-cooled flange prevents excessive local heating
standard NW 100CF-F fitting

To find out more about deposition monitors and other accessories for vacuum systems from Oxford Vacuum Science e-mail us at technology@oxford-vacuum.com.

Oxford Vacuum Science Ltd
18 Enstone Road
Middle Barton
Oxfordshire
OX7 7BN UK

tel: +44 (0) 7495 463875

OVS@oxford-vacuum.com