Oxford Vacuum Science's substrate platens support a range of features and options, such as all in one substrate level solutions including shutter and deposition monitor for smaller substrates and substrate rotation for greater deposition uniformity over larger substrates. Standard features and options are listed in the table below, whilst other variations may be available on request. Note that not all options are compatible. Contact OVS for more details.
| SP 95 | Sub θ | SPX | |||||
| recommended for | NanoSphere 3 | NanoSphere 4 | PicoSphere | ||||
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| platen size /mm | 95 | 140 | 190 | 240 | 95 | ||
| max substrate Ø | 78mm /3" | 118mm /4⅝" | 168mm /6⅝" | 218mm /8⅝" | 78mm /3" | ||
| substrate rotation | ✘ | ✔ | ✔ | ✔ | ✘ | ||
| removeabe substrate mounting plate | ✔ | ✔ | ✔ | ✔ | contact OVS | ||
| number of clamps | 4 | 4 | 8 | 8 | 4 | ||
| water cooling | ✔ | contact OVS | contact OVS | contact OVS | option | ||
| halogen radiative backside heating | contact OVS (240W/360W*) | 360W (540W*) |
1320W (1800W*) |
1320W (1800W*) |
contact OVS (240W/360W*) | ||
| max substrate temperature | contact OVS | 475°C | 475°C | 475°C | contact OVS | ||
| integrated substrate shutter | ✔ | ✘ | ✘ | ✘ | contact OVS | ||
| integrated deposition monitor head | ✔ | ✘ | ✘ | ✘ | contact OVS | ||
* higher power ratings subject to size and availability of 60W halogen bulbs
To find out more about Oxford Vacuum Science's substrate platen range e-mail us at technology@oxford-vacuum.com.
Oxford Vacuum Science Ltd
18 Enstone Road
Middle Barton
Oxfordshire
OX7 7BN UK
tel: +44 (0) 7495 463875
OVS@oxford-vacuum.com
