Telemark R508

miniature eb source

Telemark's R508 miniature electron beam deposition source can be integrated into Oxford Vacuum Science's VapourStation 5C bench-top high vacuum platform as part of a thermal evaporation suite with VapourPhase Ω. The source is fitted with its moutning axis perpendicular to that of VapourPhase Ω such that the melt is on the centreline of the chamber with up to two resistive sources either side. As it is aligned with the power rails the source can be used with accessories such as indivual source shutters and rate ramp deposition monitors

• 1.5cc capacity, 3kW hearth
  
  
• 270° beam deflection angle to prevent filament contamination
  
  
• fits between VapourPhase Ω side baffles to prevent cross-contamination
  
  
• compatible with VapourPhase Ω source shutter
  
  
• compatible with VapourPhase Ω rate ramp monitor
  
  
• 3kW switchmode "Warp 3 FX" filament bias power supply with integrated filament power supply from beamtec
  

To find out more about Oxford Vacuum Science's deposition source range e-mail us at technology@oxford-vacuum.com.