Oxford Vacuum Science  
Bench-top high vacuum and thin film products    
 

VapourPhase Ω



High Performance Thermal Evaporation

High rate, high efficiency thermal evaporation, including high temperature materials, and featuring :

  • 3kW on-board power
    Up to 950A, 12V from the most compact, flexible and ergonomic evaporation power supply available

  • High temperature
    Evaporation of high temperature materials incl Nickel, Platinum, Titanium, Quartz, Alumina etc

  • High purity
    Low desorption of volatile species from water cooled power rails and source clamping gear

  • Sequential evaporation
    In-vacuo, high current switch and power rail power distribution for sequential multi-layer evaporation of up to 4 materials

  • Low cross-contamination
    High reflectivity baffle / reflectors prevent cross-contamination and increase source efficiency




Options:

  • High η radiation reflector kit
    Highest evaporation temperatures and low radiation losses from dimple boats and filament-type crucible heaters with reflector kits which focus radiated heat back on to the evaporation sources

  • Integrated source shutters
    Sequentially operated individual source shutters for degassing and rate ramp of evaporants

  • Rate ramp monitor
    Individual quartz crystal monitor heads mounted at low angle to view melt even when source shutter is closed. Rate ramp monitor (RRM) shutter option extends crystal life by masking crystal head when source shutter is open

For more information and latest news on availability, please contact technology@oxford-vacuum.com.


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Oxford Vacuum Science Ltd
39 South Street
Middle Barton
Oxfordshire
OX7 7BU UK

tel: +44 (0) 1869 349161
fax: +44 (0) 1869 349157
OVS@oxford-vacuum.com


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