Oxford Vacuum Science Limited
Bench-top high vacuum and thin film products
VapourPhase Ω
VapourPhase Ω is a new advanced mounting system for resistive evaporation providing a real, low cost alternative to electron beam technology.
Amongst its unique features are:
- a high current, in-vacuo switch allowing sequential evaporation of up to four materials
- Oxford Vacuum Science's unique Power Rail source clamp mounting system
- individual source baffles reducing cross contamination and radiative losses
- a water cooling circuit benefitting the feedthrough, source clamps and baffles
- rapid release source clamping system
- on-board 3KW high current power supply with 400A/8V and 800A/4V (nominal) output ranges
- remote 15A power feed supply with current / voltage control and remote serial interface for PC data-logging and thickness/rate control
- vacuum and water safety interlock switches
VapourPhase Ω is mounted on a DN 100 ISO-K flange (please contact
technology@oxford-vacuum.com if you require other flange sizes/types) and is easily integrated into most
high vacuum chambers. It supports most source types and sizes including filaments, basket and crucible heaters, boats,
baffle boxes, chromium rods...
VapourPhase Ω is also available as part of Oxford Vacuum Science's NanoSphere bench-top high vacuum / thin film deposition system suite (shown left, with short upper chamber and VapourPhase Ω thermal evaporation system installed.
For more information and latest news on availability, please contact technology@oxford-vacuum.com.
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Oxford Vacuum Science Limited
39 South Street
Middle Barton
Oxfordshire
OX7 7BU UK
tel: +44 (0) 1869 349161
fax: +44 (0) 1869 349157
OVS@oxford-vacuum.com