Oxford Vacuum Science Limited  
Bench-top high vacuum and thin film products    
 
Bench-top high vacuum &
thin film deposition products

Oxford Vacuum Science offers a range high vacuum products for research & development and light industrial applications.

Oxford Vacuum Science's product range includes:

NanoSphere
NanoSphere is a highly flexible bench-top high vacuum platform for research & development and light industrial applications. Features and typical performance encompass:
  • All stainless steel "bell-jar" type vacuum chamber
    > low 10-7mbar range ultimate pressure

    •
  • 16m3/hr roughing pump for rapid evacuation
    >atmosphere to 1x10-5mbar in 5 minutes

    •
  • 240l/s wide-range turbo-pump for high vacuum
    > low 10-6mbar range in less than 1 hour
NanoSphere offers a safe power-off / shut-down mode for storing the chamber in clean, dry conditions, at a pressure of a few mbar and therefore protecting the turbo-pump bearing lubricant, whilst venting the backing pump to prevent rotary pump oil migration.

VapourPhase Ω
VapourPhase Ω is a new advanced mounting system for thermal evaporation, providing a real, low-cost alternative to electron beam technology, and featuring:
  • a high current, in-vacuo switch, for multi-layer deposition of up to four materials
  • Power Rail source clamp mounting system
  • individual source baffling
  • water cooling for thermal stability
  • rapid release source clamps
  • on-board 800A high current power supply
  • current / voltage control and RS232 interface
Oxford Vacuum Science develops innovative vacuum coating technologies to provide you with market leading performance in a compact, low cost format. For more information click on one of the product links opposite or e-mail technology@oxford-vacuum.com.

Bespoke High Vacuum Components

In addition to its range of standard products, Oxford Vacuum Science also offers a bespoke design and fabrication service to satisfy your existing vacuum requirements. For projects such as improving access to existing vacuum chambers or reducing evacuation times by optimising pumping system integration click on Design opposite.

To find out more about the products and services Oxford Vacuum Science provides click on one of the links, or to contact a high vacuum consultant or engineer click on the contact link or e-mail us at design@oxford-vacuum.com.

Oxford Vacuum Science Limited
39 South Street
Middle Barton
Oxfordshire
OX7 7BU UK

tel: +44 (0) 1869 349161
fax: +44 (0) 1869 349157
 OVS@oxford-vacuum.com
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